CVD Tube Furnace

The CVSIC Vacuum Laboratory CVD Tube Furnace is built for chemical vapor deposition and high-temperature heat treatment, serving university labs, research institutions, and manufacturers. With a high-purity ceramic fiber chamber, robust resistance wires or rods, and high-purity quartz or alumina tubes, it reaches temperatures of up to 1600℃ while maintaining a high vacuum and precise gas flow control. Stainless steel flanges ensure a pure environment and efficient results.

With a 50-segment programmable control, dual-layer air-cooling, and ±1°C accuracy, this system supports advanced deposition and heat treatment. It integrates gas mixing and flow control, making it ideal for high-precision research and small-volume production needs.

CVSIC CVD Tube Furnace Application

Unlock new possibilities with the CVSIC vacuum CVD tube furnace for a wide range of advanced scientific, industrial, and manufacturing applications:

• Thin Film Deposition: Chemical vapor deposition (CVD) for preparing semiconductor films, coatings, and functional materials.
• Nanomaterial Preparation:Make and heat-treat carbon nanotubes, silicon wires, and thin-layered materials.
• Lithium Battery Materials: CVD processes and high-temperature sintering for cathode and anode materials.
• Ceramics and Powder Metallurgy: Used to cover and treat ceramics and metal powder at high heat.
• Scientific Research: Helps create new materials and supports basic research at schools and labs.
• Industrial Applications: Used for small-batch production of precise films and materials with CVD methods.

CVSIC CVD Tube Furnace Features

• Wide Temperature Range: Supports 1200℃, 1400℃, 1600℃ (operating temperatures 1100℃, 1300℃, 1600℃) to meet diverse CVD process requirements.
• High Vacuum Performance: Ultimate vacuum of 7×10⁻⁴ Pa and maximum vacuum of -0.1 MPa maintain a pure deposition environment.
• Precise Gas Control: Gas mixing tank and flowmeter provide precise N₂, Ar, and multi-gas regulation.
• Flexible Furnace Tube Options: High-purity quartz (1200℃) or alumina (1400℃, 1600℃) tubes offer high-temperature resistance and corrosion resistance.
• Intelligent Temperature Control: 50-segment PID control ensures ±1℃ accuracy and ±5℃ uniformity.
• Safety Design: Auto power cutoff for safety; dual-layer air-cooling keeps surface below 50℃.
• Durable Construction: Adjustable flange design extends tube life and lowers maintenance needs.
• Efficient Heating: Heats up to 20℃/min, optimizing experimental efficiency.

Customization Services

CVSIC provides you with fully customized solutions to guarantee a seamless fit for your unique CVD process requirements, ensuring every specification is precisely met:

• Furnace Tube Customization: Select tube diameters from 40mm to 120mm and heating zone lengths of 300mm, 350mm, 400mm, or 450mm. Select from high-purity quartz or aluminum oxide materials according to your research requirements.
• Temperature Configuration: Customizable 1200℃, 1400℃, or 1600℃ temperature ranges for specific process requirements.
• Heating Elements: Options include HRE molybdenum-containing resistance wire, silicon carbide rods, or MoSi2 Heating rods. Select the heating element that best suits your temperature and process requirements.
• Vacuum & Gas System: Choose between high vacuum (7×10⁻⁴ Pa), low vacuum configurations, or a multi-gas control system featuring flow meters for specific gas types.
• Control System: Select either a 7-inch HD touchscreen, PC connectivity software for remote operation, or data logging functionality to suit your monitoring preferences.
• Global Support: Provides installation guidance, operational training, and maintenance services to ensure long-term stable operation.

CVSIC Vacuum Laboratory CVD Tube Furnace Accessories

Standard Accessories

• Tube Plugs: 4 pcs
• Furnace Tube: 1 pc
• Vacuum Pump: 1 unit
• Vacuum Sealing Flanges: 2 sets
• Vacuum Gauge: 1 unit
• Gas Mixing Tank: 1 unit
• Flow Meter: 1 unit

Optional Accessories

• Vacuum System: Rotary Vane Pump, Diffusion Pump, Molecular Pump
• Flange Accessories: Quick-Release Flanges, Tee Flanges
• Control System: 7-inch HD Touchscreen

Unlock the power of CVSIC CVD tube furnaces for the most demanding vapor deposition needs! Contact our team today to receive an instant quote, access detailed technical manuals, or request customized support. Choose CVSIC and experience personalized expertise—our specialists will ensure your equipment is a perfect match for your laboratory or production requirements.