Vacuum Tube Furnace

The Vacuum Tube Furnace is an advanced device designed for high-temperature heat treatment and atmosphere control. It is widely used in metal processing, lithium battery materials, ceramics, powder metallurgy, and research experiments.

It features a high-purity ceramic fibre furnace chamber, equipped with HRE molybdenum resistance wire, silicon carbide rods, or MoSi2 heating elements, with a maximum temperature of 1600°C . It supports high vacuum/low vacuum (7×10⁻⁴Pa, molecular pump) and inert atmospheres (N₂, CO₂, Ar). The furnace tube is available in high-purity quartz (1200°C) or alumina (1400°C, 1600°C), paired with a 304 stainless steel double-layer sealed flange to ensure efficient heating and pure atmosphere.

This furnace model has a 30-segment programmable intelligent control system and a double-layer air-cooled structure, supporting sintering, brazing, chemical vapour deposition (CVD), and heat treatment processes. It features a new multi-temperature zone design (dual-temperature zone, triple-temperature zone, and five-temperature zone), with each temperature zone capable of independent temperature control, making it suitable for the preparation of carbon nanotubes, silicon nanowires, and complex processes. It is ideal for laboratory research and small-scale production in universities, research institutions, and industrial enterprises.

Note: Furnace tube size, power, vacuum degree, number of temperature zones, and atmosphere systems can be customized to meet specific customer requirements. Contact us for detailed technical specifications.

CVSIC Vacuum Tube Furnace Features

The Vacuum Tube Furnace, with its advanced technology and user-centric design, offers the following core advantages:

• Wide temperature range: Supports 1200°C, 1400°C, and 1600°C (operating temperatures of 1100°C, 1300°C, and 1600°C), meeting diverse heat treatment requirements.
• High vacuum performance: Equipped with a molecular pump, achieving a ultimate vacuum of 7×10⁻⁴ Pa and a maximum vacuum of -0.1 MPa, ensuring a pure heat treatment environment.
• Precise atmosphere control: Supports inert atmospheres (N₂, CO₂, Ar), with 304 stainless steel double-sealed flanges to prevent gas leakage, optimising sintering results.
• Flexible furnace tube selection: High-purity quartz (1200°C) or high-purity alumina (1400°C, 1600°C), resistant to high temperatures and corrosion, extending service life.
• Multi-zone temperature control: Supports dual-zone, triple-zone, and five-zone independent temperature control, meeting complex processes such as CVD and nanomaterial preparation.
• Intelligent temperature control: 30-segment programmable PID control with temperature accuracy of ±1°C and heating rate ≤20°C/min, meeting high-precision process requirements.
• Safety protection: Over-temperature and leakage automatic power-off protection, dual-layer air-cooled structure ensures surface temperature below 50°C, ensuring operational safety.
• Durable design: Adjustable flange support structure at both ends reduces stress on the furnace tube and extends service life.
• Standard accessories: These include tube plugs, thermocouples, furnace tubes, vacuum pumps, vacuum flanges, and vacuum pressure gauges to simplify the operating process.

CVSIC Vacuum Tube Furnace Application

Vacuum Tube Furnaces are widely used in the following industries and processes:

• Lithium-ion battery materials: sintering and chemical vapour deposition of cathode and anode materials.
• Ceramic industry: sintering and heat treatment of special, electronic, and functional ceramics.
• Powder metallurgy: High-temperature sintering and heat treatment of metal powders and alloy materials.
• Research and laboratories: Universities and institutions use it for heat treatment experiments on new materials (such as carbon nanotubes, silicon nanowires, and composite materials).
• Vapour deposition: Chemical vapour deposition (CVD) and thin film deposition processes.
• Brazing: Brazing of high-precision metal and ceramic components.

This furnace type provides an efficient solution for customers requiring high vacuum, precise temperature control, and multi-temperature zone processes, particularly suitable for laboratory research and small-scale production.

Customisation services

CVSIC offers comprehensive customisation services to ensure seamless integration with your production and R&D needs:

• Furnace tube dimensions and materials: Customise furnace tube diameter (40–120 mm) and heating zone length (220–450 mm), supporting high-purity quartz or aluminium oxide materials.
• Temperature configuration: Supports customised temperature ranges of 1200°C, 1400°C, or 1600°C to accommodate specific processes.
• Heating elements: Choose from HRE molybdenum resistance wire, silicon carbide rods, or high-purity molybdenum rods to optimise heating efficiency.
• Vacuum and atmosphere systems: Customise high vacuum (7×10⁻⁴ Pa), low vacuum, or inert gas systems, supporting float/mass flow meters and multi-channel gas control.
• Multi-zone design: Customise dual-zone, triple-zone, or five-zone independent temperature control to meet complex process requirements.
• Control system: Features a 7-inch high-definition touchscreen, computer-connected software, and data-logging control programs to enhance automation levels.

Optional Accessories

• Vacuum System: Rotary vane mechanical, diffusion, or molecular pumps.
• Atmosphere System: Float/mass flow meter, multi-gas control.
• Quick-release/three-way flange: Enhances operational convenience.
• Global Support: Provides installation guidance, operational training, and maintenance services to ensure the stable, long-term operation of the equipment.

Contact CVSIC for customised vacuum tube furnace solutions tailored to your industry, supporting global wholesale and custom orders.